[1825 days] Oxygen in Silicon
[1825 days] Oxygen in Silicon [1825 days] Oxygen in Silicon

[1825 days] Oxygen in Silicon

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CHI TIẾT SẢN PHẨM

Mã sản phẩm:
9780127521428
Tồn kho:
Còn hàng
Danh mục
Mua eTextbooks trực tuyến
Nhà xuất bản:
Elsevier S & T
Loại bìa:
Page Fidelity
Ngôn ngữ:
English
Tác giả:
Willardson, Robert K.


Special Price 1,853,000 VNĐ

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Số lượng

This volume reviews the latest understanding of the behavior and roles of oxygen in silicon, which will carry the field into the ULSI era from the experimental and theoretical points of view. The fourteen chapters, written by recognized authorities representing industrial and academic institutions, cover thoroughly the oxygen related phenomena from the crystal growth to device fabrication processes, as well as indispensable diagnostic techniques for oxygen.

Key Features
* Comprehensive study of the behavior of oxygen in silicon
* Discusses silicon crystals for VLSI and ULSI applications
* Thorough coverage from crystal growth to device fabrication
* Edited by technical experts in the field
* Written by recognized authorities from industrial and academic institutions
* Useful to graduate students, scientists in other disciplines, and active participants in the arena of silicon-based microelectronics research
* 297 original line drawings

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