[1825 days] Oxygen in Silicon
CHI TIẾT SẢN PHẨM
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Key Features
* Comprehensive study of the behavior of oxygen in silicon
* Discusses silicon crystals for VLSI and ULSI applications
* Thorough coverage from crystal growth to device fabrication
* Edited by technical experts in the field
* Written by recognized authorities from industrial and academic institutions
* Useful to graduate students, scientists in other disciplines, and active participants in the arena of silicon-based microelectronics research
* 297 original line drawings
Sản phẩm liên quan
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